| 摘要 |
<p>A reticle having a polarized filter is provided to improve resolution of patterns by using a pellicle for covering a circuit pattern provided on a glass substrate to convert a light into a polarized light. A reticle(10) includes a glass substrate(20) and a pellicle(30). The glass substrate is provided with a circuit pattern(21) formed at a side thereof. The pellicle is provided on a surface of the glass substrate to cover the circuit pattern. The pellicle is a transparent polarized filter for converting a light incident from a light source into a polarized light. By using the pellicle of the transparent polarized filter, the polarized light is incident into a lens such that resolution of a pattern is improved by easily controlling the polarized light.</p> |
