发明名称 Process for the back-surface grinding of wafers
摘要 The present invention relates to a process for the back-surface grinding of wafers using films which have a support layer, which is known per se, and an adhesion layer which can be polymerized in steps, and to films which include such an adhesion layer which can be polymerized in steps, and to the use thereof.
申请公布号 KR100661282(B1) 申请公布日期 2006.12.27
申请号 KR20037014305 申请日期 2003.11.03
申请人 发明人
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
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