| 发明名称 |
PROBE DEVICE CAPABLE OF BEING USED FOR PLURAL KINDS OF TESTERS |
| 摘要 |
<p>A probe device(10) has an insert ring(14) and a base card holder(13) that match a pogo ring(15) and probe card(17) for plural kinds of testers. The base card holder (13) is formed to have a larger diameter than a card holder(20) for the probe card(17). A conversion ring(16) links the connection between the card holder(20) and the base card holder(13).</p> |
| 申请公布号 |
EP1736787(A1) |
申请公布日期 |
2006.12.27 |
| 申请号 |
EP20050726695 |
申请日期 |
2005.03.16 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
NOGUCHI, MASAYUKI |
| 分类号 |
G01R1/06;G01R31/28;G01R1/073;H01L21/66 |
主分类号 |
G01R1/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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