| 摘要 |
A microelectromechanical device having a reset electrode (418, 518, 618, 718, 818) for use in various devices including display devices (900) such as those employing spatial light modulators (200). The device includes an optically transmissive substrate (214, 320, 414, 514, 614, 714, 814), a semiconductor substrate (212, 318, 412, 512, 612, 712, 812), and a member (210, 410, 510, 610, 710, 810) deflectable between a rest position and an operative position supported by one of the substrates (214, 320, 414, 514, 614, 714, 814, 212, 318, 412, 512, 612, 712, 812). The deflectable member (210, 410, 510, 610, 710, 810) returns to an undeflected position by operation of the reset electrode (418, 518, 618, 718, 818). |
