发明名称 |
Production method of opto-electronic device array |
摘要 |
An opto-electronic device array is made from a multilayer epitaxial film by the following steps. The multilayer epitaxial film is separated into a plurality of segments. The segments are transferred to a first substrate to be arranged in an array substantially. Active regions are respectively confined in the segments so that the active regions form the array.
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申请公布号 |
US7153361(B2) |
申请公布日期 |
2006.12.26 |
申请号 |
US20030743087 |
申请日期 |
2003.12.23 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
FURUYAMA HIDETO |
分类号 |
C30B25/12;H01L31/10;C30B23/00;C30B25/00;C30B25/14;C30B28/12;C30B28/14;H01L31/18;H01S5/42 |
主分类号 |
C30B25/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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