发明名称 Semiconductor wafer and manufacturing process for semiconductor device
摘要 A semiconductor wafer 1 has first scribe lines 31 in two mutually perpendicular directions which have a first width and divide the semiconductor wafer 1 into a plurality of areas; second scribe lines 32 which have a second width smaller than the first width and divide the area into a plurality of semiconductor chip areas 2; an electrode pad 5 formed along the edge of the semiconductor chip area 2; and a metal-containing accessory pattern 4 disposed in the scribe lines. In the second scribe lines 32, the accessory pattern 4 is absent in at least the outermost surface in an area adjacent to the edge having the electrode pad 5 in the chip area 2.
申请公布号 KR100661084(B1) 申请公布日期 2006.12.26
申请号 KR20050051027 申请日期 2005.06.14
申请人 发明人
分类号 H01L21/301;H01L21/46;H01L21/78;H01L23/544 主分类号 H01L21/301
代理机构 代理人
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