SURFACE TREATMENT METHOD, MANUFACTURING METHOD OF COLOR FILTER SUBSTRATE, AND MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE

摘要

A surface processing method, a method for manufacturing a color filter substrate, and a method for manufacturing an electro-optical apparatus are provided to perform the plasma process of a substrate effectively and uniformly, by relatively reciprocating the substrate during the plasma process. A voltage is applied between a discharge generating unit including discharge generators(4a,4b) and a supporter(10), thereby obtaining plasma from gas supplied to a gap between the discharge generators and the substrate. One of the discharge generating unit and the substrate is relatively moved in a first direction while the substrate is exposed to the plasma. The moved one is relatively moved in a second direction contrary to the first direction while the substrate is exposed to the plasma.