发明名称 Method of making a semiconductor device that has copper damascene interconnects with enhanced electromigration reliability
摘要 A method of making a semiconductor device is described. That method includes forming a copper containing layer on a substrate, and forming an alloying layer that includes an alloying element on the copper containing layer. After applying heat to cause an intermetallic layer that includes copper and the alloying element to form on the surface of the copper containing layer, a barrier layer is formed on the intermetallic layer.
申请公布号 US7153774(B2) 申请公布日期 2006.12.26
申请号 US20020165679 申请日期 2002.06.06
申请人 INTEL CORPORATION 发明人 HAU-RIEGE STEFAN;HAU-RIEGE CHRISTINE;ZHENG WEN-YUE
分类号 H01L21/44;H01L21/768 主分类号 H01L21/44
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