发明名称 Method for calibrating a radius test bench
摘要 In a method for calibrating a radius test bench for measuring radii of optical elements, in particular of lenses and spherical mirrors, there are provided an illuminating system 1 that generates a spherical wave and a diffractive optical element 3 that retroreflects a spherical wave of a specific radius into itself. The diffractive optical element 3 is introduced into the radius test bench in at least two positions, a first position thereof being a cat's eye position 1 and another position being an autocollimation position, as a result of which it is possible to use the radius of curvature simulated by the diffractive optical element 3 to detect deviations of the radius test bench from this radius of curvature as errors of the radius test bench, and thus to take them into account in the measurements of optical elements to be tested.
申请公布号 US7154612(B2) 申请公布日期 2006.12.26
申请号 US20030420573 申请日期 2003.04.22
申请人 CARL ZEISS SMT AG 发明人 FREIMANN ROLF
分类号 G01B9/02;G01B11/24 主分类号 G01B9/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利