发明名称 Integrated VI probe
摘要 Integrated voltage and current (VI) probe ( 18 ) for integration inside a transmission line ( 17 ) having inner ( 3 ) and an outer ( 4 ) conductors. Current probes, often implemented as loop antennas, can be coupled to the outer conductor. The probes can either be built onto the same panel or on different panels.
申请公布号 US7154256(B2) 申请公布日期 2006.12.26
申请号 US20050504159 申请日期 2005.03.18
申请人 TOKYO ELECTRON LIMITED 发明人 PARSONS RICHARD;JACKSON ROBERT;DELP DEANA R.
分类号 G01R31/02;G01R27/26;H01J7/24;H01J37/32 主分类号 G01R31/02
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