| 发明名称 |
Method for removing particles from elements installed in a vacuum chamber |
| 摘要 |
Gas is introduced prior to a flooding process of a vacuum chamber of a vacuum installation, into coverings of elements, which coverings can be ventilated such that solid bodies are blown out of said coverings thereby preventing a penetration of said solid bodies into the coverings.
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| 申请公布号 |
US7153372(B2) |
申请公布日期 |
2006.12.26 |
| 申请号 |
US20050050233 |
申请日期 |
2005.02.03 |
| 申请人 |
APPLIED MATERIALS GMBH & CO. KG. |
发明人 |
HEIN STEFAN;KLEMM GUENTER |
| 分类号 |
B08B5/04;B65H5/02;B08B5/02;B65H23/025;B65H27/00;C23C14/56;D06C3/06;D21G1/02;F16C13/00;H01L21/02 |
主分类号 |
B08B5/04 |
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代理人 |
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