发明名称 |
CONTAINER FOR RECEIVING LARGE-SIZE PELLICLE FOR LITHOGRAPHY |
摘要 |
A container for receiving a large-sized pellicle for lithography is provided to perform easily a reinforcing process by simplifying a reinforcing structure thereof. A large-sized pellicle container includes a frame having four or more sides. Each side has a length of 300 mm or more. The large-sized pellicle container further is used for receiving a large-sized pellicle. The large-sized pellicle container is formed with a resin. A part of an exterior of the large-sized pellicle container is attached on a container reinforcing body after a loading process of the large-sized pellicle container. The large-sized pellicle container is formed with a cover for receiving the pellicle and a tray for supporting and transporting the cover.
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申请公布号 |
KR20060133452(A) |
申请公布日期 |
2006.12.26 |
申请号 |
KR20060032207 |
申请日期 |
2006.04.10 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
NAGATA YOSHIHIKO |
分类号 |
H01L21/673;G03F1/62;G03F7/20;H01L21/027 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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