发明名称 Jet singulation
摘要 Techniques for singulating a substrate into a plurality of component parts is disclosed. The singulation techniques include generating a jet stream in order to cut through large components so as to produce smaller components. The techniques are particularly suitable for singulating surface mount devices such as chip scale packages, ball grid arrays (BGA), flip chips, lead less packages (QFN) and the like. The techniques are also suitable for singulating photonic devices.
申请公布号 US7153186(B2) 申请公布日期 2006.12.26
申请号 US20040930695 申请日期 2004.08.30
申请人 发明人
分类号 B24B5/00;B24C1/04;B24C3/32;B24C7/00;B24C9/00;H01L21/00;H01L21/301;H05K3/00 主分类号 B24B5/00
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