发明名称 bottom-gate type thin film transistor, flat panel display including the same and fabrication method of the thin film transistor
摘要 A bottom gate thin film transistor (TFT), a flat panel display having the same, and a method of fabricating the same are disclosed. The TFT comprises a gate electrode disposed on a substrate, and a gate insulating layer disposed on the gate electrode. A semiconductor layer is disposed on the gate insulating layer and crossing over the gate electrode, and is crystallized by an MILC technique. An inter-insulating layer is disposed on the semiconductor layer and comprises source and drain contact holes which expose portions of the semiconductor layer. The source and drain contact holes are separated from at least one edge of the semiconductor layer crossing over the gate electrode. The semiconductor layer comprises conductive MIC regions corresponding to the exposed portions of the semiconductor layer in the source and drain contact holes.
申请公布号 KR100659759(B1) 申请公布日期 2006.12.19
申请号 KR20040079693 申请日期 2004.10.06
申请人 发明人
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
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