| 摘要 |
A furnace apparatus is provided to quickly cool temperature of a process tube by directly spraying cold air onto a surface of the process tube. A furnace apparatus includes a heater assembly enclosing a process tube(110) receiving plural substrates. The heater assembly has a heat insulation block(122) with a heat coil(124) installed therein, and an air cooling member(130) having a supply part(132) for supplying a cooling air into the heat insulation block and a discharge part(140) for discharging hot air from the heat isolation block. The supply part has plural spray pipes penetrating the heat isolation block.
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