| 摘要 |
A cleaner apparatus of a CMP equipment is provided to perform exactly and rapidly the replacement work by connecting a finger to a spindle finger using a single finger fixation screw. A cleaner apparatus comprises a cleaning part for cleaning a wafer, and a spin part for rinsing and drying the cleaned wafer. The spin part further includes a spindle finger(60) for mounting the wafer, a plurality of fingers(70) connected to the spindle finger, and a plurality of finger fixation screws(80) corresponding to the fingers. The finger fixation screws connect the fingers to the spindle finger.
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