发明名称 Impurity-based waveguide detectors
摘要 An optical circuit including a semiconductor substrate; an optical waveguide formed in or on the substrate; and an optical detector formed in or on the semiconductor substrate, wherein the optical detector is aligned with the optical waveguide so as to receive an optical signal from the optical waveguide during operation, and wherein the optical detector has: a first electrode; a second electrode; and an intermediate layer between the first and second electrodes, the intermediate layer being made of a semiconductor material characterized by a conduction band, a valence band, and deep level energy states introduced between the conduction and valence bands.
申请公布号 US7151881(B2) 申请公布日期 2006.12.19
申请号 US20040856127 申请日期 2004.05.28
申请人 APPLIED MATERIALS, INC. 发明人 WEST LAWRENCE C.;PEARSALL THOMAS P.;LEON FRANCISCO A.;MOFFATT STEPHEN
分类号 G02B6/10;G02B;G02B6/12;G02B6/136;G02B6/42;H01L31/0232;H01L31/0312;H01L31/09;H01L31/105;H01L31/11;H01L31/18;H01S5/00 主分类号 G02B6/10
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