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发明名称
APPARATUS FOR MEASURING SURFACE PARTICULATE CONTAMINATION
摘要
申请公布号
KR100659802(B1)
申请公布日期
2006.12.19
申请号
KR20010059396
申请日期
2001.09.25
申请人
发明人
分类号
G01N1/04;G01N1/02;G01N15/06;G01N21/94
主分类号
G01N1/04
代理机构
代理人
主权项
地址
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