发明名称 THIN FILM TRANSISTOR, FABRICATION METHOD THEREOF AND LIQUID CRYSTAL DISPLAY HAVING THE THIN FILM TRANSISTOR
摘要 The present invention relates to a thin film transistor, a fabrication method thereof and a liquid crystal display having the thin film transistor, and an object of the present invention is to provide a thin film transistor which improves a fabrication yield, a fabrication method thereof and a liquid crystal display having the thin film transistor. In a bottom-gate-type thin film transistor 1 having a gate electrode 4 formed on a substrate, a gate insulating film 6 formed on the gate electrode, an operational semiconductor film 8 formed on the gate insulating film 6 on the gate electrode 4, a channel protection film 3 formed on the operational semiconductor film, and a source and a drain electrodes 14 and 15 formed on both sides of the top surface of the channel protection film 3 connected to the operational semiconductor film with the operational semiconductor, and the channel protection film 3 has a first insulating layer 10 contacting to an upper interface of the operational semiconductor film 8 and a second insulating layer 11 formed on the first insulating layer.
申请公布号 KR100657387(B1) 申请公布日期 2006.12.19
申请号 KR20000046589 申请日期 2000.08.11
申请人 发明人
分类号 G09F9/30;G02F1/136;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786 主分类号 G09F9/30
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