| 摘要 |
A block insulator of an ion implanter is provided to prevent beam deposition onto the block insulator by adding a protective shield on the block insulator. First and second insulators(102,104) are provided on one side of an arc chamber of a source head of an ion implanter, and are connected to each other to constantly maintain an interval between the insulators and a filament clamp. A protective shield(106) is provided on an upper end of the first insulator to protect source head short due to beam deposition. The protective shield has a shield portion(106a) for protecting the upper end of the first insulator and a fastening portion(106b) with both ends connected to the second insulator.
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