发明名称 SEMICONDUCTOR TEST APPARATUS
摘要 A semiconductor test device is provided to increase the test speed of semiconductor chips by directly applying a high speed synchronous signal to plural semiconductor chips. A semiconductor test device includes a controller(210), a reference semiconductor element(220), plural semiconductor elements(230a~230x) to be tested, and a test logic(240). The controller generates a control signal. The reference semiconductor element receives the control signal and outputs a reference result signal, which is a comparison criterion. The objective semiconductor elements output result signals to be compared with the control signal to determine defectiveness. The test logic paratactically applies the control signal to the objective semiconductor elements and compares the result signals from the semiconductor elements with the reference result signal to determine whether the semiconductor elements are defective.
申请公布号 KR20060129575(A) 申请公布日期 2006.12.18
申请号 KR20050048200 申请日期 2005.06.07
申请人 UNITEST INC. 发明人 OH, HYO JIN;KIM, SUN WHAN;LEE, SANG SIG
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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