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发明名称
半导体装置之制造方法
摘要
本发明之半导体装置之制造方法,其特征在于包含如下步骤:将藉由使过氢化矽氮烷聚合物分散于含碳之溶剂中而生成之过氢化矽氮烷聚合物溶液涂布于半导体基板上,藉此形成涂布膜;藉由对上述涂布膜进行热处理,使上述溶剂挥发而形成聚矽氮烷膜;及将上述半导体基板插入特定炉内,使上述炉内之压力暂时降低后,将水蒸气导入上述炉内,藉此一面使上述炉内压力上升,一面对上述聚矽氮烷膜进行氧化处理,藉此形成氧化矽膜。
申请公布号
TW200644154
申请公布日期
2006.12.16
申请号
TW095104377
申请日期
2006.02.09
申请人
东芝股份有限公司
发明人
星岳志;清利正弘
分类号
H01L21/76(2006.01);H01L21/316(2006.01)
主分类号
H01L21/76(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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