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发明名称
HEIZELEMENT FÜR EINEN CVD-APPARAT
摘要
申请公布号
AT346378(T)
申请公布日期
2006.12.15
申请号
AT20010963526T
申请日期
2001.09.07
申请人
JAPAN AS REPRESENTED BY PRESIDENT OF JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;ANELVA CORPORATION
发明人
MATSUMURA, HIDEKI;MASUDA, ATSUSHI;ISHIBASHI, KEIJI;TANAKA, MASAHIKO;KARASAWA, MINORU
分类号
C23C16/24;C23C16/34;C23C16/44;C23C16/452;C23C16/455;(IPC1-7):H01L21/205;H01L21/31
主分类号
C23C16/24
代理机构
代理人
主权项
地址
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