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发明名称
HERSTELLUNGSVERFAHREN FÜR EIN HALBLEITERBAUELEMENT UND GATE-STAPEL
摘要
申请公布号
AT345580(T)
申请公布日期
2006.12.15
申请号
AT19990942555T
申请日期
1999.08.31
申请人
MICRON TECHNOLOGY, INC.
发明人
YIN, ZHIPING;IYER, RAVI;GLASS, THOMAS, R.;HOLSCHER, RICHARD;NIROOMAND, ARDAVAN;SOMERVILLE, LINDA, K.;SANDHU, GURTEJ, S.
分类号
H01L21/027;H01L21/28;H01L21/311;H01L21/318;H01L21/3205;H01L21/3213;H01L23/52;H01L29/423;H01L29/43;H01L29/49;H01L29/78;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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