VERWENDUNG EINES DOPPELTSCHICHTIGEN PHOTOLITHOGRAPHISCHEN RESISTS ALS NEUES MATERIAL FÜR OPTISCHE SPEICHERUNG

摘要

An optical information storage medium ( 1 ) comprising a carrier substrate ( 5 ), a reflective information layer ( 10 ) being positioned on the carrier substrate ( 5 ) and comprising at least a first layer ( 11 ) of a first inorganic material in a first structural phase, and at least a second layer ( 12 ) of at least a second inorganic material in at least a second structural phase is disclosed. Alloy inclusions ( 6 ) are formed in the information layer ( 10 ) upon exposure to a first electromagnetic radiation and have a microstructure comprising a mixture of the first material in the first structural phase and the at least second material in the at least second structural phase. The optical properties of the alloy inclusions are different from the optical properties of the as-deposited information layer so that a modulation in electromagnetic radiation reflected from the alloy inclusions and from an area comprising the as-deposited information layer, respectively, is provided in response to a second electromagnetic radiation being emitted towards the optical information storage medium ( 1 ) to provide a read-out signal. A method of manufacturing and reading such a medium are also provided. High density recording/reading at various radiation wavelengths, including UV, and compatibility with standard CD and DVD media is achieved.