Vorrichtung und Verfahren zur Reinigung einer Ionenquelle während eines Prozesses,申请号DE19996031099T-传众专利搜索

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发明名称	Vorrichtung und Verfahren zur Reinigung einer Ionenquelle während eines Prozesses
摘要
申请公布号	DE69931099(T2)	申请公布日期	2006.12.14
申请号	DE19996031099T	申请日期	1999.03.22
申请人	AXCELIS TECHNOLOGIES INC.	发明人	GRAF, MICHAEL ANTHONY;BENVENISTE, VICTOR MAURICE
分类号	H01J27/02;H01J27/04;C23C14/48;H01J37/08;H01J37/317;H01L21/265	主分类号	H01J27/02
代理机构		代理人
主权项
地址

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