| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that a piezoelectric vibration element itself is largely distorted and piezoelectric vibration characteristic may be deteriorated because an external stress such as bending is applied to only the piezoelectric vibration element, when a vibration frequency desired for a piezoelectric vibrator is an ultra-high frequency, the thickness of the piezoelectric resonation element must be very thin, and when such a thinned piezoelectric vibration element is used for a piezoelectric vibrator having a conventional structure. <P>SOLUTION: A piezoelectric vibration element is bonded to a reinforcing substrate having an element holding substrate having a frame and having a through-hole formed on a center in a space surrounded by this frame. A first container is arranged on the other main surface of the reinforcing substrate, and a second container is arranged on the other main surface of the piezoelectric vibration element. The first container is hermetically bonded to the frame of the reinforcing substrate, and the second container is hermetically bonded to the piezoelectric vibration element. An excitation electrode of the piezoelectric vibration element is electrically connected to an external connection electrode terminal of the second container. <P>COPYRIGHT: (C)2007,JPO&INPIT |
