| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an optical modulation element array in which a hinge is made long without expanding an optical functional film. <P>SOLUTION: On the optical modulation element array 100, rotational displacement type optical modulation elements 61 which have optical functional films 65 provided above a substrate 63, hinge parts 67 freely tiltably support the optical functional films 65, and micro mirror support parts 69 which connect the end parts 67a of the hinge parts 67 to the substrate 63, are two-dimensionally arranged in the first and second directions X and Y which cross at right angle. The optical modulation elements 61 are aligned linearly in the first direction X but aligned zigzag in the second direction Y being displaced in the first direction X by approximately 1/2 amount of an element with respect to the optical modulation element 61 which is adjacent in the second direction Y, and the end parts 67a of the hinge parts 67 formed in parallel to the second direction Y are arranged in gaps 71 of the optical modulation elements 61 which are adjacent in the first direction X. <P>COPYRIGHT: (C)2007,JPO&INPIT |
