| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably hold a reticle by suppressing the deformation thereof due to dust biting. <P>SOLUTION: The reticle chuck includes a first holder for holding the reticle in right posture, a second holder arranged around the first holder, and an elastic member for sealing which has a resiliency in a direction perpendicular to the pattern plane of the reticle and is arranged around the second holder. The top face of the elastic member for sealing which is in contact with the rear face of the reticle is formed of a material having a small sticking property. <P>COPYRIGHT: (C)2007,JPO&INPIT |
