| 摘要 |
PROBLEM TO BE SOLVED: To prevent applying of an overload to a moving mechanism without worsening measurement accuracy. SOLUTION: In this image measuring method to capture a momentary image without stopping image pick-up means for a measurement stage at measurement places MP1-MP3 and take in information required for measurement, an overshoot path is created on a side for passing through the measurement place MP1 in a first direction when an angle of the first direction toward the first place MP1 to be measured next for a second direction toward the measurement place MP2 as the next measurement place of the measurement place MP1 exceeds a predetermined angle. Measurement speed at the measurement place MP1 is reduced, as the angle of the first direction for the second direction gets larger. COPYRIGHT: (C)2007,JPO&INPIT
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