发明名称 DISPLAY METHOD OF TERMINAL OR PROBE PIN, PROBE DEVICE, AND PROBE CARD INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To enable an inspector to search simply for a terminal image or a probe pin image to be aimed. SOLUTION: An image processing part 33 stores beforehand information of a terminal name and a tester pin number of a semiconductor integrated circuit received from an input/display device 40 by a main control part 31, then stores an image signal of the terminal image or an image signal of the probe pin image outputted from cameras 9, 10, and performs processing of the image signal, to thereby correlate the terminal image or the probe pin image with the terminal name and the tester pin number stored beforehand. The inspector designates a specific terminal or the probe pin by a cursor from among a plurality of terminal images or probe pin images displayed on the input/display device 40. The image processing part 33 displays the terminal name and the tester pin number together with the terminal image or the probe pin image relative to the terminal or the probe pin designated by the inspector on the input/display device 40. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006337242(A) 申请公布日期 2006.12.14
申请号 JP20050163856 申请日期 2005.06.03
申请人 HITACHI HIGH-TECH DE TECHNOLOGY CO LTD 发明人 MORI HIROFUMI
分类号 G01R31/28;G01R1/073;G01R31/26;H01L21/66 主分类号 G01R31/28
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