| 摘要 |
PROBLEM TO BE SOLVED: To promote elastic deformation in an arm region regardless of constant position relation between the needle tip and a reference point and of small abrasion of the needle tip. SOLUTION: The probe contains a main member having a tip end region and supported with a supporting member like a cantilever beam and a needle tip member combined in the tip end region of the main member. The needle tip member contains a base part of which at least a part is embedded in the tip end region, a contact part pressed to an inspection object and projecting to the second direction from the base part, and a reference part formed at a location with an interval in the first direction from the contact part and projecting to the second direction crossing with the first direction from the base part. It is manufactured with a harder material than the main member. COPYRIGHT: (C)2007,JPO&INPIT
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