| 摘要 |
PROBLEM TO BE SOLVED: To provide a support method of discriminating an organic laminated membrane which enables to discriminate respective organic compound layers in the organic laminated membrane composed by laminating a plurality of kinds of organic compound layers. SOLUTION: This selectively detects loss electrons in which energy loss in a prescribed range of energy out of non-elastic scattering electrons Es2 which have penetrated through a test sample 2. A signal intensity distribution Iout in respective organic compound layers 511 to 515 is prepared based on a signal intensity of these loss electrons. Then, the organic laminated membrane 31 is tested by using this signal intensity distribution Iout. COPYRIGHT: (C)2007,JPO&INPIT
|
