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发明名称
ZWEISTUFIGES CHEMISCH-MECHANISCHES POLIERVERFAHREN
摘要
申请公布号
DE60124252(D1)
申请公布日期
2006.12.14
申请号
DE20016024252
申请日期
2001.06.28
申请人
INFINEON TECHNOLOGIES NORTH AMERICA CORP.;INFINEON TECHNOLOGIES RICHMOND LP
发明人
PAGE, JOSEPH
分类号
H01L21/3105;B24B37/04
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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