| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam light source which can irradiate electrons having a uniform current density with respect to a wide area. SOLUTION: The electron beam light source for irradiating an electron current EF against a target T, is provided with a plurality of number of electron guns 10 which are arranged two-dimensionally and which form electron beams EB, and a third grid 5 which forms the electron current EF, by making the current density have a Gaussian distribution and by making them overlapped. COPYRIGHT: (C)2007,JPO&INPIT
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