FLOW RATE METER AND FLOW RATE CONTROL SYSTEM USING THE SAME

摘要

Provided are a flow rate meter where production of bubbles is prevented or suppressed to enable flow rate measurement at excellent measurement accuracy in a micro flow rate region and where fluid and bubbles are less likely to stay, and a flow rate control system using the flow rate meter. The flow rate meter is a meter for measuring a micro flow rate of liquid flowing in a fluid channel where the exit environment has a constant pressure, and the flow rate meter has a flow rate measurement piping section, a pressure sensor, and a pressure detection/control section (4). The flow rate measurement piping section is connected to an exit side end of a fluid channel (1), has a smaller channel cross-sectional area than the fluid channel, has an exit environment with a constant pressure, and has a predetermined length. The pressure sensor is provided near the exit of the fluid channel (1) and detects, on the upstream side of the flow rate measurement piping section, the pressure of the liquid. The pressure detection/control section (4) calculates a flow rate based on fluid pressure detected by the pressure sensor.