A METHOD AND SYSTEM FOR IMPROVED DELIVERY OF A PRECURSOR VAPOR TO A PROCESSING ZONE

摘要

A method and system (1, 100) for improved delivery of a solid precursor (52, 152). A chemically inert coating (43) is provided on internal surfaces (41) in a precursor delivery line (40, 140) to reduce decomposition of a relatively unstable precursor vapor in the precursor delivery line (40, 140), thereby allowing increased delivery of the precursor vapor to a processing zone (33, 133) for depositing a layer on a substrate (25, 125). The solid precursor (52, 152) can, for example, be a ruthenium carbonyl or a rhenium carbonyl. The inert coating (43) can, for example, be a C_XF_y-containing polymer, such as polytetrafluoroethylene or ethylene­chlorotrifluoroethylene. Other benefits of using an inert coating (43) include easy periodic cleaning of deposits from the precursor delivery line (40, 140).