SURFACE PROCESSING APPARATUS USING NEUTRAL BEAM

摘要

A surface processing apparatus using a neutral beam is provided to solve problems due to a line reaction of source gas and reaction gas by separately forming a supply route of the source gas and a supply route of the reaction gas. A shower head(240) generates plasma using supplied gas and converts the plasma into a neutral beam. The shower head supplies source gas separated from a reaction gas supply route. A plurality of injection holes are formed at a lower portion of the shower head. The shower head uniformly injects the neutral beam and the source gas to a process space of an object to be processed in a showering manner. An RF apply portion is formed at an upper portion of the shower head. An external RF power source is supplied to the RF apply portion. The shower head includes a plasma generator(250), a neutral beam generator(260), a cooling portion(270), and a source gas injection unit(280). The cooling portion cools heat generated by the neutral beam generator.