| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a vacuum structure by which a stable heat insulation performance can be obtained and a surface treatment can be performed simultaneously. <P>SOLUTION: In the method of manufacturing a vacuum structure to obtain high vacuum from 10<SP>-4</SP>Torr to 10<SP>-6</SP>Torr by discharging air from the internal space 13 of components 11 and 12 in low vacuum from 10<SP>-2</SP>Torr to 1 Torr, sealing the internal space, post-heating and activating a getter 15; post-heating is performed from 250°C to 830°C, while attaching a surface material forming a surface layer 20 to at least a part of the outer surface of the constituting members. The activation of the getter 15 and the surface treatment of the constituting members are simultaneously performed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
