| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type dynamic quantity sensor for accurately measuring dynamic quantity by displaying stable device characteristics. SOLUTION: Island-like bodies 12a and 12b composed of silicon are buried in a glass substrate 11. The island-like bodies 12a and 12b are conduction parts with fixed electrodes divided, respectively. Electrodes 13a and 13b are formed on a principal plane 11a of the glass substrate 11 so as to be electrically connected to the island-like bodies 12a and 12b. The fixed electrodes 14a and 14b are formed on a principal plane 11b of the glass substrate 11 so as to be electrically connected to the island-like bodies 12a and 12b. Since a signal of change in capacitance detected between a pressure sensitive diaphragm 15a and the fixed electrodes 14a and 14b is acquired from the electrodes 13a and 13b through the island-like bodies 12a and 12b, a measuring pressure is calculated on the basis of the signal (serial composition capacity). COPYRIGHT: (C)2007,JPO&INPIT
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