| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing apparatus which can efficiently detect faulty openings, in the wiring of a device under measurement. SOLUTION: The test apparatus for testing faulty opening in the device under measurement comprises a charge supply section for supplying an area under measurement, including wiring formed on the surface of the device under measurement which is subjected to a faulty opening test giving charges, a measuring probe which is arranged facing the surface of the device under measurement and is formed of an electrically conductive material, a probe drive section for moving the measuring probe and changing the distance between the measuring probe and the wiring, a measuring section for measuring the electric potential of the measuring probe, and a decision section for deciding whether there is faulty opening in the wiring, on the basis of the change in the electric potential of the measurement probe, when the measurement probe is moved by the probe drive section. COPYRIGHT: (C)2007,JPO&INPIT
|
