| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously detect a plurality of diffracted X-rays corresponding to crystal faces, and to quickly and simultaneously specify a plurality of crystal structures in a membrane. SOLUTION: A medium 2 for measurement is fixed and installed, and the incident angle of synchrotron radiation X-rays 11 to the membrane surface is limited to a predetermined angle. In this state, the synchrotron radiation X-rays 11 are made to come, all of the plurality of diffracted X-rays 21 occurring correspondingly to the crystal faces in the membrane are simultaneously detected, and the intensities of the plurality of detected diffracted X-rays 21 are evaluated, and the plurality of crystal structures existing in the medium 2 for measurement are simultaneously specified. COPYRIGHT: (C)2007,JPO&INPIT
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