| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning table device capable of finely moving and rotating a heavy object, while suppressing generation of foreign matter. SOLUTION: An arm 13c has parallel springs 13v, and thereby an abutting position of a driven part 13t and a rolling wheel 25 in an axis direction of the table 13 can be maintained due to bending of the parallel springs 13v as shown in a Fig.6(b), even when the table 13 is displaced in the axis direction, and generation of foreign matter by sliding can be suppressed. As a result, generation of foreign matter such as garbage can be suppressed. Comparatively large axis direction force received by the table 13 can be supported by a non-contact type bearing. COPYRIGHT: (C)2007,JPO&INPIT
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