SUBSTRATE PROCESSING APPARATUS WITH REMOVABLE COMPONENT MODULE

摘要

A substrate processing apparatus having a frame (22), a housing (24), an access system (25, 300) and^-at least a substrate transport apparatus (34) or a substrate processing device (38). The housing is connected to the frame. The access system is connected to the frame and forms an access (300) through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion (18). The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus.