摘要 |
PROBLEM TO BE SOLVED: To provide a high quality pixel reduced in residual image and time duration noise. SOLUTION: Asymmetrical doping is formed in a transfer region 38. When a channel region is formed by doping, a dopant concentration is made higher at the neighborhood of a photodetector 34 than the neighborhood of a floating diffusion 36. Thus, imperfect charge transmission is avoided. In addition, punch through suppressive implantation parts 70 and 72 are not formed below the photodetector. Therefore, the collection of an electron optically formed by the photodetector is not interfered. COPYRIGHT: (C)2007,JPO&INPIT
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