| 摘要 |
PROBLEM TO BE SOLVED: To shorten inspection time while reducing inspection costs by dispensing with a waiting time till stabilizing of voltage when inspecting a semiconductor device by changing voltage level. SOLUTION: This device comprises a power supply control part 121 which linearly varies an internal power supply voltage applied to an internal cell 122 of the semiconductor device according to a control counter signal 101 which is provided from outside on a board on which the semiconductor device 131 or the semiconductor device 132 is mounted, and the device controls the power supply control part 121 using the control counter signal 101 so that the power supply voltage applied to the semiconductor device varies synchronizing with a signal for inspection applied to the semiconductor device. Accordingly, the waiting time till stabilizing of voltage become unnecessary and the inspection time can be shortened, and thus the inspection costs can be reduced. Furthermore, inspection efficiency can be higher by changing the voltage level of a clock or data applied to the semiconductor device in the power supply control part 121. COPYRIGHT: (C)2007,JPO&INPIT
|
