| 摘要 |
PROBLEM TO BE SOLVED: To provide an on-machine shape-measuring apparatus capable of measuring the surface shape of a work piece, while and making it contact the measurement probe at low-contact pressure. SOLUTION: The on-machine shape measuring apparatus 30 measures the vibration components in the locked state of a servo-motor before starting the measurement (S14), sets up the notch filter 66 for removing the vibration components (S18), removes the machine vibration components in the locked state etc., of the servomotor by the set notch filter 66 (S20) from the output of a linear scale 44, after starting the measurement. Thereby, even if the measurement probe 32 goes into a state of light contact with the workpiece, the state of the probe is apt to receive the effects of the machine vibration, high-accuracy shape measurements can be realized, by removing the machine vibration component and canceling the effects. COPYRIGHT: (C)2007,JPO&INPIT
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