| 摘要 |
<p>A process comprising disposing a target and an ionic liquid in a vacuum chamber and applying electric power to the target so as to conduct sputtering toward the ionic liquid, thereby producing, dispersed in the ionic liquid, ultrafine particles or ultrafine particle aggregates each composed of a multiplicity of ultrafine particles linked in the form of three-dimensional network. Highly dispersible ultrafine particles or ultrafine particle aggregates can be efficiently produced only by introducing the ionic liquid in a general-purpose sputtering apparatus. Further, because of the process making use of sputtering, it is feasible to produce ultrafine particles, or aggregates thereof, consisting of an alloy of two or more types of metals with different vapor pressures at a desired alloy composition ratio, and to produce ultrafine particles, or ultrafine particle aggregates, of a metal with high boiling point or sublimation point.</p> |
