| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a plurality of optical disk substrates from one master glass plate by solving problems of surface deterioration due to oxidation processing and squareness deterioration due to the transfer of 2P resin. SOLUTION: A method for manufacturing a stamper for optical disk substrates comprises a process for exposing a master plate (quartz glass 10 or the like) coated with photoresist 2 through a pattern, a process for developing exposed patterns (4, 5) of the photoresist 2 and producing a master plate, a process for transferring a pattern shape formed on the surface of the master plate to a base material 91 by using photopolymer (2P) resin 80, and a process for forming a protection film 93 using a dielectric substance as a material on the pattern formed on the base material 91. COPYRIGHT: (C)2007,JPO&INPIT
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