| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure regulator capable of shortening a leak test time regardless of the existence of a protrusive annular rib formed on a pressure plate of a diaphragm. SOLUTION: In the pressure regulator 50 in which a gas inlet I communicates with a gas outlet O through a regulating valve mechanism R, the gas outlet O communicates with a diaphragm chamber 46, pressure fluctuations in the gas outlet O are led to the diaphragm chamber 46 and the regulating valve mechanism R is activated by the displacement of a diaphragm 21, air holes 22b are provided in the protrusive annular rib 44 of the pressure plate 22 for backing up the diaphragm 21, and a high-cut valve mechanism H sharing the regulating valve mechanism R is provided side by side, if necessary. COPYRIGHT: (C)2007,JPO&INPIT
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